![]() Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. ![]() Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic.
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